SEM (Scanning Electron Microscope)
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| Figure 1.Scanning Electron Microscope - LEO 1530 System |
The Scanning Electron Microscope facility, part of the Texas Materials Institute, contains cutting edge
equipment to analyze morphology, structure, and composition of solid samples in the SEM chamber.
The LEO 1530 scanning electron microscope (Figure 1) features a GEMINI field emission column with a thermal field emitter and
a 3 nm resolution at 1 kV. The electron gun can operate at a range from 200 V to 30 kV with a high probe current.
The facility's design provides extreme stability for consistent performance.
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| Figure 2.SEM multi-specimen loader |
Figure 3.Cr coater for sample preparation |
The system also contains an in-lens
annular detector for a bright, clear, surface-specific image. For quantitative elemental analysis and mapping of the
sample, the SEM system uses Energy Dispersive X-Ray Spectroscopy (EDS). The operation of the system is entirely
computerized and allows for quick multi-specimen loading (Figure 2). Some samples may require a metal coating for visibility
on the SEM system and may be coated with the in-house Cr deposition chamber (Figure 3).
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| Figure 4.Modular Electron Beam Induced Deposition chamber |
An additional system (Figure 4) has been developed to work modularly in conjunction with the SEM chamber to study
Electron Beam Induced Deposition (EBID) of metals onto a substrate. A virtually isolated system holds the sample
and contains a precursor gas at a slightly higher pressure than the SEM chamber pressure (Figure 5); this small
cell was custom designed to fit perfectly inside the SEM chamber. A small pinhole in the deposition cell allows
the electron beam to enter, and minimizes exposure of the relatively high pressure precursor gas to the sensitive SEM chamber.
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| Figure 5.Deposition cell containing the sample and precursor gas |
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